Sep 20, 2026  
2026-2027 Catalog 
    
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2026-2027 Catalog
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EGEN 474 - Intro to Micro/nanoelectromechanical Systems

2 credits (2 hrs Lec)
This course covers the theory and application of MEMS and NEMS from a standpoint of design, fabrication, and  characterization.

Prerequisite(s): (EGEN 324  or EMEC 320 ) and EGEN 335 . 


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