May 15, 2024  
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2021-2022 Catalog [ARCHIVED CATALOG]

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EGEN 474 - Intro to Micro/nanoelectromechanical Systems

2 credits (3 hrs Lec)
This course covers the theory and application of MEMS and NEMS from a standpoint of design, fabrication, and  characterization.

Prerequisite(s): Senior Standing or instructor approval.


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